Energy Dispersive Spectrometry & Electron Backscatter Diffraction

Energy Dispersive X-Ray Spectroscopy (EDS) is a chemical microanalysis technique used in conjunction with SEM. The EDS technique detects x-rays emitted from the sample during bombardment be an electron beam to characterize the elemental composition of the analyzed volume. Features or phases as small as 1 micrometer or less can be analyzed. EDS provides microchemical information from a sample placed inside a SEM. A sample with unknown chemistry is analyzed spectra, elemental distribution maps and quantified chemistry information is produced.


Electron Backscatter Diffraction (EBSD) provides microstructural information from a sample placed inside SEM. A sample of known chemistry is analysed and maps of microstructure (grain orientation) plots of orientation frequency (pole figures), phase % and grain size are produced.

Oxford instruments INCA Synergy Technical Specifications:

- INCA Synergy combines the very best EDS and EBSD systems

- Easy point and click phase identification based on chemistry and crystallography

- Combines mapping of samples for chemistry, crystal phase, and crystal orientation; powerful data display capabilities showing both EBSD and EDS elemental maps;

- Sub-setting capability to isolate phases by chemistry, crystallography, or both